Handbook of Semiconductor Technology: Processing of Semiconductors, Volume 2

In this self-contained handbook deals on the enabling materials technology for the electronics industry world-renowned authors treat the processing of semiconductors and related technologies.

Content:
Chapter 1 Silicon Processing (pages 1–65): John G. Wilkes
Chapter 2 Compound Semiconductor Processing (pages 67–109): J. Brian Mullin
Chapter 3 Epitaxial Growth (pages 111–176): Thomas E Kuech and Michael A. Tischler
Chapter 4 Photolithography (pages 177–263): Rainer Leuschner and Georg Pawlowski
Chapter 5 Selective Doping (pages 265–289): Subhash Mahajan
Chapter 6 Etching Processes in Semiconductor Manufacturing (pages 291–339): Kevin G. Oonohoe, Terry Turner and Kenneth A. Jackson
Chapter 7 Silicon Device Structures (pages 341–390): Chun?Yen Chang and Simon M. Sze
Chapter 8 Compound Semiconductor Device Structures (pages 391–406): William E. Stanchina and Juan E Lam
Chapter 9 Silicon Device Processing (pages 407–487): Dim?Lee Kwong
Chapter 10 Compound Semiconductor Device Processing (pages 489–605): John M. Parsey
Chapter 11 Integrated Circuit Packaging (pages 607–647): Daniel I. Amey
Chapter 12 Interconnection Systems (pages 649–681): Wulf Knausenberger